The 65h JSAP Spring Meeting, 2018

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Poster presentation

6 Thin Films and Surfaces » 6.3 Oxide electronics

[19p-P5-1~39] 6.3 Oxide electronics

Mon. Mar 19, 2018 1:30 PM - 3:30 PM P5 (P)

1:30 PM - 3:30 PM

[19p-P5-22] Epitaxial synthesis and dielectric property measurement on ε-Ga2O3

〇Subaru Yusa1, Daichi Oka1, Tomoteru Fukumura1,2,3 (1.Tohoku Univ., 2.WPI-AIMR, Tohoku Univ., 3.CSRN, Tohoku Univ.)

Keywords:Gallium Oxide, MistCVD, Epitaxial Thin film