[20a-P2-1~17] 3.8 Optical measurement, instrumentation, and sensor

[20a-P2-5] Effect of NA on imaging ellipsometric measurements

〇Lianhua Jin¹, Ryosuke Sugao¹, Makoto Uehara² (1.Univ. of Yamanashi, 2.Mejiro 67 Co. Ltd)

Keywords:imaging ellipsometer