1:15 PM - 1:30 PM
[20p-B301-1] Chromatic Aberration on Curved-Multilayer Mirror for EUV Imaging System
Keywords:multilayer mirror, extreme ultraviolet, microscope
Presentation information
Oral presentation
7 Beam Technology and Nanofabrication » 7.1 X-ray technologies
[20p-B301-1~13] 7.1 X-ray technologies
Tue. Mar 20, 2018 1:15 PM - 4:45 PM B301 (53-301)
Mitsunori Toyoda(Tohoku Univ.), Takashi Imazono(QST), Norio Watanabe(Univ. of Tsukuba)