[18a-PA5-1~8] 3.15 Silicon photonics

[18a-PA5-3] Suspended Si waveguides with subwavelength grating cladding in the mid-infrared

〇(M2)Rikito Osako^1,2, Xuejun Xu¹, Osamu Tadanaga³, Kentarou Sawano², Takuya Maruizumi², Takehiko Tawara^1,4, Hideki Gotoh¹ (1.NTT BRL, 2.Tokyo City Univ., 3.NTT DTL, 4.NTT NPC)

Keywords:mid-infrared, waveguide, grating coupler