[9p-W323-1~17] 8.1 プラズマ生成・診断

[9p-W323-3] In-situ Measurements of Electron Density and Film Thickness by Curling Probe

Mizuki Hanajima¹、Keiji Nakamura¹、Hideo Sugai²、〇(B)DAISUKE OGAWA¹ (1.Chubu University、2.Nagoya Industrial Sci. Res. Inst.)

キーワード：Plasma Diagnostics, Film Deposition, In-situ