[13p-D511-1~8] Pitfalls in thermoelectric measurements

[13p-D511-8] Thermal Conductivity Measurement by 3 omega method

〇Koji Miyazaki¹ (1.Kyushu Inst. Tech.)

Keywords:Thermal conductivity, Thin film

Thermal conductivity of a thin film with sub-micron thickness can be measured by 3 omega method. The measured results are often used to characterize the thermal performance of the electronic device with thin films. The 3 omega measurement can be carried out by using only metal strip wire with about 10-micrometer width on the sample without any unique equipment, therefore the thin film thermal conductivity is often measured by the 3 omega method. The 3 omega method will be introduced by using some specific examples in the talk.