The 82nd JSAP Autumn Meeting 2021

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Oral presentation

6 Thin Films and Surfaces » 6.1 Ferroelectric thin films

[12p-N301-1~15] 6.1 Ferroelectric thin films

Sun. Sep 12, 2021 1:30 PM - 5:30 PM N301 (Oral)

Shintaro Yasui(Tokyo Tech), Takashi Eshita(Wakayama Univ.)

5:15 PM - 5:30 PM

[12p-N301-15] Evaluation of CSD-Derived Zr-rich HfO2-ZrO2 thin films .

〇Ryohei Okamoto1, Hiroshi Funakubo2, Hiroshi Uchida1 (1.Sophia Univ., 2.Tokyo Tech.)

Keywords:Ferroelectric thin films, Hafnium dioxide, Chemical solution deposition