[21p-P05-1~5] 3.5 レーザー装置・材料

[21p-P05-5] 高速動作可変形鏡の開発と特性評価：影響関数を取り入れた制御モデルの検討

〇コスロービアン ハイク¹、谷口 誠治¹、稲田 順史¹、本越 伸二¹、藤田 雅之¹、則武 卓也³、岩清水 優³、西方 伸吾³、醍醐 浩之³、榊 直人²、月花 智博²、戎崎 俊一² (1.レーザー総研、2.理研、3.三菱重工業)

キーワード：可変形鏡

A deformable mirror (DM) control model based on the prior determination of the influence functions (IF) of individual piezo-actuators (PAs) in the DM is described for “open-loop” applications. Two control cases, with- and without neglecting the crosstalk effects between the neighboring PAs in the DM, are elucidated. A 19PA DM, a prototype for 61PA DM, has been built, experimentally characterized by the IF control model, and demonstrated by reproducing the individual Zernike polynomials and synthetically generated random wavefronts. It was experimentally demonstrated that when the crosstalk between the neighboring PAs is not negligible, it must be taken into consideration for successful control and operation of the real DM.