5:45 PM - 6:00 PM [18p-Z05-16] First-principles study on defect structure of SiC(000-1)/SiO2 interface with wet oxidation 〇(M1)Mukai Tsunasaki1, Yuki Mimbu1, Mitsuharu Uemoto1, Tomoya Ono1 (1.Kobe Univ.)