[16a-Z10-1~10] 3.15 Silicon photonics and integrated photonics

▼ [16a-Z10-8] Compact suspended complex Si MS-SW BG sensor for higher-sensitivity refractive index sensing

〇(D)Siim Heinsalu¹, Anna Kawano¹, Yushi Isogai¹, Yuichi Ishikawa¹, Hiroshi Ishikawa¹, Katsuyuki Utaka¹ (1.Waseda Univeristy)

Keywords:Sensors, Bragg grating, SOI

One of the most simplistic semiconductors sensing devices are Bragg gratings (BG), however the typical lengths for traditional BG are in the order of few hundred micrometers [1]. To make the BG sensor shorter it is necessary to make each period more sensitive for the surrounding medium. A promising configuration for high sensitivity is combination of multiple slots and sub wavelength (MS-SW) [2]. It has been shown that making the BG suspended sensitivity is also increased [3]. In the following study we combined both to MS-SW BG and suspended BG to improve the sensitivity. To keep the sensor compact we limit period count to 20.