[16a-Z32-1~10] 22.1 合同セッションM 「フォノンエンジニアリング」

▼ [16a-Z32-9] Experimental Observation of Thermal Transport of Surface Phonon-Polaritons over Hundreds Micrometers

〇(P)Yunhui WU¹、Jose ORDONEZ-MIRANDA^2,3、Laurent JALABERT^1,3、Saeko TACHIKAWA¹、Roman ANUFRIEV¹、Sebastian VOLZ^1,3、Masahiro NOMURA¹ (1.IIS Univ. of Tokyo、2.Inst. Pprime France、3.LIMMS Univ. of Tokyo)

キーワード：Surface Phonon Polaritons, dielectric membrane, thermal conduction

At nanoscale, enhancing heat propagating distance attracts intensive attentions for improving the thermal performance in micro- and nanoelectronics. However, the major heat carriers, phonons, propagate ballistically shorter than one micrometer above room temperature. To compensate this limited propagation, we propose a novel heat carrier, surface phonon polariton (SPhP), which generates from the hybridation of the optical phonons and the photons and propagates in the range of a few hundred micrometers. Here, we conduct a 3ω measurement of SiN suspended submicron films to investigate the thermal transport by SPhP in hundreds micrometers range.