[20a-P06-1~11] 12.7 医用工学・バイオチップ

▲ [20a-P06-9] Geometric optimization of Pt catalyst array for the sensitivity enhancement of SnO₂-based gas sensor

〇Ang Li¹、Xuesi Li¹、Reo Kometani¹、Ichiro Yamada²、Makiko Noma²、Katsufumi Nakanishi²、Yusuke Fukuda²、Kazuyuki Sashida²、Toshiyuki Takemori²、Kenichi Maehara²、Katsuya Ikeda²、Kenichi Yoshida²、Yoshio Mita¹、Shin'ichi Warisawa¹ (1.Univ. of Tokyo、2.Shindengen Co., Ltd.)

キーワード：MOx gas sensor, numerical model, spillover

Detecting acetone in human breath has been proposed as a non-invasive method of diabetes diagnosis. Metal oxide semiconductor type gas sensors have been shown by previous works to be promising for breath diagnosis. This work investigated a relationship between the sensitivity and a platinum array on SnO₂ thin film to figure out its optimized structure. A numerical model was derived to interpret the sensitivity enhancement mechanism based on oxygen spillover effect, and to give predictions of higher performance sensor structures.