2022年第83回応用物理学会秋季学術講演会

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一般セッション(ポスター講演)

17 ナノカーボン » 17 ナノカーボン(ポスター)

[21p-P12-1~54] 17 ナノカーボン(ポスター)

2022年9月21日(水) 13:30 〜 15:30 P12 (体育館)

13:30 〜 15:30

[21p-P12-22] Temperature dependence of CVD graphene nanomechanical resonator

〇(DC)Alexandro Nogueira1、Shohei Enomoto1、Manoharan Muruganathan1、Afsal Kareekunnan1、Masashi Akabori1、Hiroshi Mizuta1 (1.JAIST)

キーワード:Graphene, Mechanical resonator

Nanomechanical resonators were fabricated with chemical-vapor-deposited (CVD) graphene. The frequency response was analyzed in different bias and temperature conditions. It was observed that the resonance frequency decreases with increasing gate bias, showing the presence of a high built-in strain. Highly non-linear responses was observed in cryogenic temperatures, which can be partly attributed to higher strain in low temperatures.