[21p-P18-1~40] 12.3 Functional Materials and Novel Devices

[21p-P18-27] Organic patterns obtained by maskless vacuum evaporation based on selective deposition of diarylethenes

〇(M1)Akari Nishimura¹, Tsuyoshi Tsujioka¹ (1.Osaka-kyoiku Univ.)

Keywords:selective deposition, diarylethene, organic pattern

In general, organic devices are fabricated by vacuum evaporation with a shadowmask and it is difficult to miniaturize organic patterns. Diarylethenes (DAEs) are reversibly changed in their molecular structure and color upon UV and visible light irradiation. And DAE shows selective metal deposition that metal-vapor atoms deposit on the colored surface but not on the colorless surface. And selective deposition is promising for obtaining fine patterns. In this study, we propose a method to fabricate fine organic patterns based on selective metal deposition without a shadowmask. The process we propose is isomerization pattern is prepared on DAE films by UV irradiation with a photomask. And Mg pattern is formed based on selective Mg deposition and organic material is deposited. Mg layer is removed by acid etching and the organic pattern is remained. We demonstrated a fine patterned OLED using this method. And this method would be applied to fine patterning of other organic devices.