[23p-C205-1~11] 4.3 Lasers and laser materials processing

▲ [23p-C205-6] [INVITED] Generation of high-aspect ratio, dense nano-plasmas in solid dielectrics with femtosecond Bessel beams

〇Francois Courvoisier^1,2、Benoit Morel^1,2、Pierre-Jean Charpin^1,2、Mostafa Hassan^1,2、Kazem Ardaneh^1,2、Valeria Viviana Belloni^1,2、Remi Meyer^1,2、Luca Furfaro^1,2、Luc Froehly^1,2、Remo Giust^1,2 (1.CNRS FEMTO-ST、2.Univ. Bourgogne Franche Comte)

キーワード：stealth-dicing, femtosecond laser, Bessel beams

For applications such as glass cutting or through-via drilling, we investigate the formation of high aspect ratio nanochannels using a femtosecond "diffraction-free" Bessel beam.It is now possible to cut glass up to 1 cm in thickness with stealth-dicing technology. We will review the main technological advances in this field and report recent results on the fundamental processes leading to the formation of very dense nano-plasmas within glass and sapphire.