The 69th JSAP Spring Meeting 2022

Presentation information

Poster presentation

7 Beam Technology and Nanofabrication » 7 Beam Technology and Nanofabrication(Poster)

[22p-P04-1~4] 7 Beam Technology and Nanofabrication(Poster)

Tue. Mar 22, 2022 4:00 PM - 6:00 PM P04 (Poster)

4:00 PM - 6:00 PM

[22p-P04-1] Development of TEM holder with biaxial tilt and observation of Si nanoindentation

〇Tongmin Chen1, Yoshifumi Oshima1 (1.JAIST)

Keywords:double tilt holder