[23p-P04-1~5] 6.1 強誘電体薄膜

▲ [23p-P04-1] Ba_3/4Sr_1/4TiO₃ freestanding sheet prepared using water-soluble Sr₃Al₂O₆ sacrificial layer

〇(M1)RUI YU¹ (1.Hokkaido University)

キーワード：freestanding sheet

Recently, freestanding sheets of perovskite oxides are available through lift-off and transfer techniques. In the synthesis, epitaxial oxide films were first fabricated on water-soluble Sr₃Al₂O₆ (SAO) layer and then peeled off from the substrates by removing the SAO layer in pure water [1]. By using the technique, ferroelectric perovskite oxide sheets, such as BaTiO₃ and BiFeO₃, have been obtained [2,3]. Herein, we report fabrication of (Ba_1/4Sr_3/4)TiO₃ (BST) freestanding sheet. Notably, BST is an industrially important dielectric perovskite material. The lateral size of the obtained BST sheet was 3 mm × 5 mm. The permittivity (ε_r) and tanδ of the BST sheet were 450 and 0.05, respectively, at 1 kHz and room temperature. The sheet also exhibited ferroelectric properties.