[24a-E301-1~10] 3.11 Photonic structures and phenomena

△ [24a-E301-1] A New Way to Evaluate AlO_x Oxidation Extent of CirD (Circular Defect in 2D photonic crystal) laser

〇(M1)Rubing Zuo¹, Shunsuke Miyazaki¹, Ryosei Kinoshita¹, Masato Morifuji¹, Hirotake Kajii¹, Akihiro Maruta¹, Masahiko Kondow¹ (1.Osaka Univ.)

Keywords:photonic crystal, oxidation width

We are developing a current-injected laser with a two-dimensional photonic crystal (PhC) circular defect (CirD) cavity, in which AlGaAs is vapor-oxidized to AlO_x, an insulator, as the upper and lower cladding layers, and AlGaAs at the center of the cavity is used as the current-injection funnel. In order to obtain a high Q value, it is necessary to ensure a constant oxidation width. However, the measurement method used so far has not been accurate. In this study, we obtained a more accurate measurement method by using overlaid EB process.