[24a-E303-1~11] 3.12 Nanoscale optical science and near-field optics

[24a-E303-11] Fabrication of Spin-on-Glass Film-Encapsulated Nanodot Array for Nanogap Measurement Applying Metal-Insulator-Metal Metamaterial Structure

〇Taiyu Okatani¹, Yoshiaki Kanamori¹ (1.Tohoku Univ.)

Keywords:metamaterial, metal-insulator-metal, nanogap

In contact and friction phenomena, nanogaps consisting of air or lubricating oil existing in the contact region is related to the behaviors, and measurement of the nanogap is required. In this study, in order to realize a nanogap measurement method applying metal-insulator-metal metamaterial structure, the fabrication of a metal nanodot array encapsulated in a glass plate is attempted by forming a spin-on-glass film on the nanodot array.