[24p-D316-1~11] 1.3 新技術・複合新領域

▲ [24p-D316-8] High-frequency permittivity sensor using multilayered ring resonator for liquid characterization

〇(D)Teguh Firmansyah Talam^1,2、Gunawan Wibisono²、Eko Tjipto Rahardjo²、Jun Kondoh¹ (1.Shizuoka University、2.Universitas Indonesia)

キーワード：high-frequency, permittivity sensor, multilayered ring resonator

A high-frequency permittivity sensor using a multilayered ring resonator (MRR) structure for liquid application is proposed. MRR sensor structure has been separated into several parts. The upper part and lower part consist of the ring resonator and ground plane, respectively. Moreover, the inside parts are separated as glass-substrate (ε_rb), liquid under test (ε_rc), and glass substrate (ε_rd). In detail, the permittivity has a value of ε_ra = 1.0 (air) ; ε_rb = 2.5; ε_rc = 80 (1.0 – 80.0) ; ε_rd = 2.5, with thickness of h_rb = 0.5 mm; h_rc = 1.0 mm; h_rd = 0.5 mm, respectively. The characteristic of multilayered SRR can be represented as effective permittivity (ε_eff) and effective thickness (h₂).