Measurement of the two-dimensional resonance features of MEMS devices using differential interference contrast microscopy

Mirai Iimori, Ya Zhang

Presentation information

Oral presentation

3 Optics and Photonics » 3.8 Optical measurement, instrumentation, and sensor

[26a-E302-1~11] 3.8 Optical measurement, instrumentation, and sensor

Sat. Mar 26, 2022 9:00 AM - 12:00 PM E302 (E302)

Takashi Kato(UEC), Minoru Tanabe(AIST)

11:30 AM - 11:45 AM

[26a-E302-10] Measurement of the two-dimensional resonance features of MEMS devices using differential interference contrast microscopy

〇Mirai Iimori¹, Ya Zhang¹ (1.TUAT)

Keywords:DIC microscope, MEMS

The measurement of resonance characteristics is an essential process for the development of micromechanical-system (MEMS) devices. In this study, we report the measurement of two-dimensional, out-of-plane vibrations of MEMS resonators using stroboscopic differential interference contrast (DIC) microscopy, for the study of the linear and nonlinear resonances of MEMS resonators.