[15p-A502-1~18] 3.14 Silicon photonics and integrated photonics (formerly 3.15)

△ [15p-A502-8] Reduction of Optical Loss of Non-volatile Phase Change Phase Shifter Based on Ge₂Sb₂Te₃S₂ Operating at Mid-infrared Wavelength

〇(D)Yuto Miyatake¹, Kotaro Makino², Junji Tominaga², Noriyuki Miyata², Takashi Nakano², Makoto Okano², Kasidit Toprasertpong¹, Shinichi Takagi¹, Mitsuru Takenaka¹ (1.Univ. Tokyo, 2.AIST)

Keywords:Si photonics, phase change material, optical phase shifter

We propose a record low-loss non-volatile phase PCM phase shifter operating at mid-infrared wavelengths based on Ge₂Sb₂Te₃S₂ (GSTS), which is a new Se-free widegap PCM. By using GSTS in the MIR range, the optical absorption of a PCM phase shifter can be considerably reduced. We achieved an optical loss of 0.29 dB for a π phase shift, which is the lowest loss ever reported for a PCM phase shifter integrated with a Si waveguide.