09:45 〜 10:00
▲ [16a-A408-4] Application of nanosecond laser annealing to diamond materials
キーワード：diamond materials, Laser annealing, amorphous carbon
Recently, the influence of pulsed laser irradiation on diamond materials, including single/poly/nanocrystalline diamond, and diamond-like materials (DLC) received much attention. In this work, the ArF laser irradiation is employed in the amorphous carbon (a-C) films, and the microstructure variations of the as-deposited and annealed films have been investigated by Raman spectroscopy and scanning electron microscopy. In addition, laser-induced doping has been applied to other wide band gap semiconductors (ex, SiC) and its effectivity is experimentally proved. In this work, we applied laser-induced doping to singlecrystalline diamond, and the doping by phosphorus and Boron is discussed from the chemical compositionally and electrical viewpoints.