2021年日本表面真空学会学術講演会

Presentation information

Poster (core time)

[3P01-27] Poster

Fri. Nov 5, 2021 1:30 PM - 3:30 PM P会場 (P会場)

座長
13:30-14:30 一ノ倉聖(東工大)
14:30-15:30 土師将裕(東大)

[3P23] Pumping performance and synchrotron radiation-stimulated desorption from Pd or Pd/TiZrV coated copper tubes

*Xiuguang Jin1, Takashi Uchiyama1, Yasunori Tanimoto1, Tohru Honda1 (1. High Energy Accelerator Research Organization)

Coated TiZrV films sorb several monolayers of O2 and H2O during air venting, so the repeated activation-air venting cycles cause an increase in the concentration of oxygen near the surface and substantially reduce the pumping performance. To solve this problem, introducing a thin Pd layer onto a getter film has been proposed. Pd does not oxidize and sorb hydrogen and CO. In the present study, Pd-overcoated TiZrV films are prepared, and the Pd effect on the pumping performance and synchrotron-stimulated desorption are investigated.