2023年日本表面真空学会学術講演会

講演情報

ポスター発表

[1P01-52] Poster Presentation

2023年10月31日(火) 16:30 〜 18:00 ポスター (1階)

[1P28] Epitaxial growth of anatase TiO2 thin film on SrTiO3 (001) by solvothermal method with fluoride ions as surfactant

*Kosuke Ono1, Masaru Shimomura1 (1. Graduate School of Science and Technology, Shizuoka University)

TiO2 is a material that still attracts the attention of researchers and has been intensively studied and applied as a photocatalyst and electron transport material. Gas phase methods are usually used to prepare anatase TiO2 epitaxial thin films. We have previously reported its epitaxial growth on LaAlO3 (001) by solvothermal method with fluoride ions, which is known as an effective surfactant for fabricating (001) faceted anatase TiO2, and local structure analysis around the dopant of the fabricated thin film. For further local structure analysis, the substrate was changed to SrTiO3 on which the thin film was fabricated by solvothermal method. The successful epitaxial growth of anatase TiO2 on SrTiO3 and the growth dependence on precursor compositions are presented.

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