2023年日本表面真空学会学術講演会

講演情報

ポスター発表

[1P01-52] Poster Presentation

2023年10月31日(火) 16:30 〜 18:00 ポスター (1階)

[1P42] Dependence of coloration efficiency of tungsten oxide films deposited by reactive sputtering on film thickness

*Shojiro Kurata1, Md. Suruz Mian1, Takeo Nakano1 (1. Graduate School of Science and Technology, Seikei University)

We deposited WO3 film on ITO substrates using reactive magnetron sputtering. Three different thicknesses of WO3 films (500, 1000, and 1500 nm) were prepared by adjusting the deposition time. CV measurements were performed with WO3/ITO as the working electrode. The voltage sweep range was -1.2~+1.6 V, and the scan rate was 10 mV/s. 50 cycles were performed, with coloration and bleaching as one cycle. Transmittance was measured for as-deposited films and at the time of colored and bleached at the initial and every 10 cycles from 10 to 50, respectively. As a result, the CEs of the 1000 nm and 1500 nm samples were about the same, but that of the 500 nm sample was higher than the others. This indicates that cations may enter differently at 500 nm than at 1000 and 1500 nm.

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