2023年日本表面真空学会学術講演会

講演情報

国際シンポジウム

[2Cp01-10] Celebration of the New Inter-society Alliances in Asia and Pacific Rim

2023年11月1日(水) 14:00 〜 18:25 大会議室234 (3階)

Chair:Yasunori Tanimoto(KEK)、Wilson Agerico Diño(Osaka University)

17:10 〜 17:35

[2Cp08] Superhard (MoSiTiVZr)Nx high-entropy nitride coatings

*Sam Zhang1 (1. Thin Films Society)

This talks covers research background and current status of high-entropy alloy coatings with emphasis on (MoSiTiVZr)Nx high-entropy nitride coatings. Will illustrate that increase of N content leads to a structure change of the (MoSiTiVZr)Nx high-entropy nitride coatings from amorphous to single FCC. Meanwhile, the grain size, hardness, damage-tolerance and wear resistance significantly increase. The maximum hardness and Young’s modulus of the coating reaches 45.6 GPa and 408.2GPa, respectively at nitrogen content of 53.7 at.%. The corrosion resistance of all the coatings tested are better than that of 304 stainless steel. At 53.7 at.% N, the corrosion resistance of the coating is slightly inferior than that the control group mainly due to increase of grain size and loose structure. The residual Mo in the coating has a positive effect on the electron transport during the corrosion process.

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