Session 6: Special Session 1-6 "Pulsed Laser-Induced Surface Structuring and Manipulation"

[R2-S06-4] Improving periodic uniformity of LIPSS on Si wafer using a flat-top beam for surface-enhanced Raman scattering
[Student presentation]

*Junha Choi^1,2, Young-Gwan Shin^1,2, Won-Seok Chang^1,2, Sunghwan Chang², Sung-Hak Cho^1,2 (1. Department of Nano-Mechatronics, Korea University of Science and Technology, South Korea (Korea), 2. Department of Nano-manufacturing Technology, Nano-Convergence Manufacturing Systems Research Division, Korea Institute of Machinery and Materials, South Korea (Korea))

キーワード：Femtosecond laser, Laser-induced periodic surface structure, surface-enhanced Raman scattering

C000010