The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

講演情報

印刷

Oral Presentation

Oral Presentations

Session 11: Micro-machining

2023年6月14日(水) 09:40 〜 11:00 Room 3 (1F Meeting Room ＃1)

Session Chairs:Yongfeng Lu(University of Nebraska-Lincoln, USA)

10:40 〜 11:00

[R3-S11-4] Laser ablation of ultrathin SiNx coated Si wafer – evaluation of process performance for PERC solar cell application
[Student presentation]

*Pinalkumar Gopaldas Rana1, Anil Kottantharayil2, Deepak Marla1 (1. Department of Mechanical Engineering, Indian Institute of Technology Bombay, Mumbai-400076 (India), 2. Department of Electrical Engineering, Indian Institute of Technology Bombay, Mumbai-400076 (India))

キーワード：Nanosecond laser, Laser ablation, Photoluminance mapping, Minority carrier lifetime

C000257

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