The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Oral Presentation

Oral Presentations

Session 13: Ultra-short pulse laser processing 1 (Beam shaping)

Wed. Jun 14, 2023 2:10 PM - 3:50 PM Room 1 (2F Meeting Room #3)

Session Chairs:Yasuhiko Shimotsuma(Kyoto University, Japan)

2:30 PM - 2:50 PM

[R1-S13-2] First-time right ablation with flexible multibeams generated by a high-power spatial light modulator

*Martin Thomas Kratz1, Moritz Kröger2, Benedikt Bornschlegel2, Martin Reininghaus1 (1. Fraunhofer ILT - Institute for Laser Technology (Germany), 2. RWTH Aachen University LLT - Chair for Laser Technology (Germany))

Keywords:Ultrashort pulse laser processing, Microstructuring, Beam shaping, High power, Spatial Light Modulator

C000174

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