The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Oral Presentation

Oral Presentations

Session 21: Ultra-short pulse laser processing 3 (Drilling, Cutting)

Thu. Jun 15, 2023 9:20 AM - 11:00 AM Room 1 (2F Meeting Room #3)

Session Chairs:Mizue Mizoshiri(Nagaoka University of Technology, Japan,)

10:20 AM - 10:40 AM

[R1-S21-4] Initial stage of Si processing using single pulse of NIR fs-laser

*Masahito Katto1, Masanori Kaku1, Yuji Sato2, Masahiro Tsukamoto2, Atsushi Yokotani1 (1. University of Miyazaki (Japan), 2. Osaka University (Japan))

Keywords:ultrashort pulsed laser, Si processing, initial stage

C000146

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