Bonding-free manufacture of large-scale fused silica microchannels enabled by hybrid laser microfabrication

Jian Xu

講演情報

Oral Presentation

Oral Presentations

Session 25: Ultra-short pulse laser processing 4 (3D glass modification and microfluidic chip)

2023年6月15日(木) 14:10 〜 15:50 Room 1 (2F Meeting Room #3)

Session Chairs:Calum Ross(Heriot-Watt University, UK)

14:10 〜 14:30

[R1-S25-1] Bonding-free manufacture of large-scale fused silica microchannels enabled by hybrid laser microfabrication

*Jian Xu¹, Aodong Zhang¹, Jianping Yu², Ming Hu¹, Xin Li¹, Ya Cheng^1,2 (1. East China Normal University (China), 2. Shanghai Institute of Optics and Fine Mechanics (China))

キーワード：Ultrafast laser assisted etching, Glass microfluidics, Chemical etching, Carbon dioxide laser, Optofluidics

C000084

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