The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

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Oral Presentation

Oral Presentations

Session 36: Process monitoring and control 1

Fri. Jun 16, 2023 9:40 AM - 10:40 AM Room 4 (2F Meeting Room #6)

Session Chairs:Masayuki Kakehata(AIST, Japan)

10:20 AM - 10:40 AM

[R4-S36-3] Classification of photo-acoustic emission in Direct Laser Interference Pattering for identifying the spatial period

*Tobias Steege1, Adrian Belkin1, Christoph Zwahr1, Andrés F. Lasagni2,1 (1. Fraunhofer Institute for Material and Beam Technology IWS (Germany), 2. Technische Universität Dresden (Germany))

Keywords:acoustic emission, Direct Laser Interference Patterning, laser-material interaction

C000180

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