The 24th International Symposium on Laser Precision Microfabrication (LPM2023)

Presentation information

Oral Presentation

Short Presentations for Poster Session

Short Presentations of Poster Session 2

Thu. Jun 15, 2023 11:20 AM - 12:10 PM Room 1 (2F Meeting Room #3)

Session Chairs:Mitsuhiro Terakawa(Keio University, Japan)

12:06 PM - 12:08 PM

[P2-24] On-machine measurement of laser-processed structures using optical interferometry
[Student presentation]

*Ren Umetsu1, Yoshio Hayasaki1, Satoshi Hasegwa1 (1. Center for Optical Research and Education, Utsunomiya University (Japan))

Keywords:optical interferometry

C000184

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