In-situ monitoring of laser machining in transparent and hard brittle materials with chuck-based electric fields

11:00 〜 11:20

[R4-S40-1] In-situ monitoring of laser machining in transparent and hard brittle materials with chuck-based electric fields

*Chao-Ching Ho¹, Han-san Xie¹, Che-Yu Hsieh¹ (1. National Taipei University of Technology (Taiwan))

キーワード：In-situ monitoring , laser machining in transparent and hard brittle materials, chuck-based electric fields

C000116

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