Fabrication of miniature optics by laser-induced thermal reflow of discretized primitive shapes with a goal-oriented process-feedback control<br /><span style="color:#008000;">[Student presentation]</span>

12:00 〜 12:20

[R4-S40-4] Fabrication of miniature optics by laser-induced thermal reflow of discretized primitive shapes with a goal-oriented process-feedback control
[Student presentation]

*Samuel Benketaf¹ (1. EPFL - IEM Galatea lab (Switzerland))

キーワード：goal-oriented process-feeback, glass micro-optics, laser induced reflow, femtosecond laser-assisted wet etching, process control

C000218

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