The 43rd Annual Meeting of The Laser Society of Japan

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Oral Presentation

D: Laser processing

[D11-20a-VII] Surface modification

Fri. Jan 20, 2023 10:45 AM - 12:30 PM Room VII (12th Floor 1202)

Chair: Hidehiko Yashiro

10:45 AM - 11:00 AM

[D11-20a-VII-01] 【論文発表賞応募演題】
エキシマレーザーによるSiウェハへの超極浅・高濃度のレーザードーピング

*Ren Aoki1, Keita Katayama2, Daisuke Nakamura2, Taizoh Sadoh2, Hiroshi Ikenoue2,3 (1. Grad. Sch. of ISEE, Kyushu Univ. , 2. Grad. Sch. of ISEE, Kyushu Univ. , 3. Department of Gigaphoton Next GLP, Kyushu Univ.)

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