[P20-SF4] Poster

[P20-SF4-04] Qubit-Compatible Substrates with Superconducting Through-Silicon Vias

Kestutis Grigoras¹, Nikolai Yurttagül¹, Jukka-Pekka Kaikkonen¹, *Elsa Mannila¹, Patrik Eskelinen¹, Nils Tiencken¹, Arto Hujanen¹, Alberto Ronzani¹, Joel Hätinen¹, Debopam Datta¹, Visa Vesterinen¹, Leif Grönberg¹, Mika Prunnila¹, Joonas Govenius¹ (1. VTT Technical Research Centre of Finland Ltd., QTF Centre of Excellence, P.O. Box 1000, FI-02044 VTT Espoo, Finland)