[D2-PR14] Slot 14

[D2-PR14-43] Thermal conductivity of amorphous and polycrystalline WO₃ films

*RIku Shimaura¹, Makoto Kashiwagi², Yuichirou Yamashita³, Takashi Yagi³, Naoyuki Taketoshi³, Yuki Oguchi¹, Yuzo Shigesato¹ (1. Aoyamagakuin Univ. (Japan), 2. Japan Science and Technology Agency (Japan), 3. National Institute of Advanced Industrial Science and Technology (AIST) (Japan))

キーワード：WO3 film, thermal conductivity, amorphous, polycrystalline, dc magnetron sputtering