Vacuum ultraviolet excimer light-induced electric conductivity improvement of epitaxial NiO thin films grown at room-temperature

6:30 PM - 8:30 PM

[H1-PR18-17] Vacuum ultraviolet excimer light-induced electric conductivity improvement of epitaxial NiO thin films grown at room-temperature

*Kenta Kaneko¹, Yuki Goto¹, Tomoaki Oga¹, Satoru Kaneko^2,1, Mamoru Yoshimoto¹, Akifumi Matsuda¹ (1. Tokyo Tech (Japan), 2. KISTEC (Japan))

Keywords:NiO, epitaxial thin films, low-temperature growth, excimer light irradiation, vacuum ultraviolet light

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