Vacuum ultraviolet excimer light-induced electric conductivity improvement of epitaxial NiO thin films grown at room-temperature

Presentation information

Poster Session

H. Innovative Materials Processing for Sustainable Society » [H-1] Smart Processing

Tue. Dec 14, 2021 6:30 PM - 8:00 PM H1-PV23 (online)

6:30 PM - 8:00 PM

*Kenta Kaneko¹, Yuki Goto¹, Tomoaki Oga¹, Satoru Kaneko^2,1, Mamoru Yoshimoto¹, Akifumi Matsuda¹ (1. Tokyo Tech (Japan), 2. KISTEC (Japan))

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