[H4-O7] Slot 07

[H4-O7-07] Realizing a Pressure Sensor Based on Liquid-Doping of Pulsed Laser Deposited SiC Thin Film

*Sree Harsha Ch¹, Paneerselvam E¹, Prasanthakumar H. G¹, Nilesh Jayantilal Vasa¹, Jayaganthan R¹ (1. Indian Institute of Technology Madras (India))

キーワード：Pulsed Laser Deposition, Laser-Assisted Doping, Silicon Carbide, Pressure Sensor