[B1-P303] Poster 303

[B1-P303-31] Thermoelectric Properties of Sb₂Te₃-based Ferecrystals based on Atomic Layer Deposition

*Kornelius Nielsch^1,2,3, Jun Yang¹, Dongho Shin¹, Sebastian Lehmann¹, Amin Bahrami¹ (1. Leibniz IFW Dresden (Germany), 2. Inst. of Applied Phys., Technical Univ. of Dresden (Germany), 3. Inst. of Materials Science, Technical Univ. of Dresden (Germany))

キーワード：Ferecrystal, Atomic Layer Deposition, Sb2Te3, ZT Chip, 2D Materials, Topological Insulator