Measurements and applications of high intensity lasers

[ALPS-13-04] Time-resolved imaging of photoresist stripping dynamics induced by laser irradiation

*Naoki Nishioka^1,2, Yuji Umeda¹, Daichi Shima¹, Ono Koichi¹, Tomosumi Kamimura¹, Hideo Horibe², Masashi Yoshimura³, Ryosuke Nakamura³ (1. Osaka Institute of Technology, 2. Osaka City University, 3. Osaka University)