OPTICS & PHOTONICS International Congress 2019

講演情報

LEDIA2019

Oral Presentation

Oral Session 7

2019年4月25日(木) 13:30 〜 14:45 411+412 (Pacifico Yokohama Conference Center)

14:00 〜 14:15

[LEDIA-7-02] Raman Scattering Investigation of Strain Evolution during Surface-Activated Bonding of GaN and Removal of Si substrate

*Ryo Tanabe1, Takuya Onodera1, Masahiro Uemukai1, Toshiki Hikosaka2, Shinya Nunoue2, Kanako Shojiki3, Hideto Miyake3,4, Maki Kushimoto5, Heajeong Cheong6, Yoshio Honda6, Hiroshi Amano6, Ryuji Katayama1 (1. Grad. School of Eng., Osaka Univ., 2. Toshiba Corporation, 3. Grad. School of Eng., Mie Univ., 4. Grad. School of RIS., Mie Univ., 5. Grad. School of Eng., Nagoya Univ., 6. Nagoya Univ.IMaSS)