Schedule 2 3:50 PM - 5:00 PM [LEDIA-P-12] Growth of AlxGa1-xN Films by RF Plasma-assisted Molecular Beam Epitaxy for Deep UV Optical Devices *naozumi tachibana1, Tomohiro Yamaguchi1, Toru Honda1, Takeyoshi Onuma1 (1. Kogakuin University)
