OPTICS & PHOTONICS International Congress 2019

講演情報

LEDIA2019

Short Oral presentaion

Short Oral Session

2019年4月24日(水) 14:15 〜 15:17 411+412 (Pacifico Yokohama Conference Center)

14:29 〜 14:31

[LEDIA-P-08] Mg composition control of co-sputtered MgZnO thin films toward the application of deep-UV transparent electrode

*Tadayoshi Sakai1, Maki Kushimoto1, Manato Deki2, Yoshio Honda2,3, Hiroshi Amano2,4,5 (1. Deptartment of Electronics, Nagoya University, 2. Institute of Materials and Systems for Sustainability, Nagoya University, 3. Institute for Advanced Research, Nagoya University, 4. Akasaki Research Center, Nagoya University, 5. Venture Business Laboratory, Nagoya University)