スケジュール 3 14:53 〜 14:55 [LEDIA-P-20] Thermodynamic Analysis of AlN Nonpolar Planes during Metalorganic Vapor Phase Epitaxy *Tsunashi Shimizu1, Yuki Seta1, Abdul Muizz Pradipto1, Toru Akiyama1, Kohji Nakamura1, Tomonori Ito1 (1. Mie University)