Short Presentation

[LEDIA6-01] Structural characterization of BGaN films grown on AlN layer

*yuhki shimizu¹, Yuto Ohta¹, Yuri Takahashi¹, Narihito Okada², Yoku Inoue¹, Takayuki Nakano^1,3 (1. Department of Electronics and Materials Science, Shizuoka University, 2. Graduate School of Sciences and Technology for Innovation, Yamaguchi University, 3. Research Institute of Electronics, Shizuoka University)