OPTICS & PHOTONICS International Congress 2020

講演情報

印刷

LEDIA2020

Short Oral Presentaion

Short Presentation

2020年4月22日(水) 11:00 〜 12:21 411+412 (Conference Center)

Session Chair: Hisashi Murakami(Tokyo University of Agriculture and Technology)

11:21 〜 11:24

[LEDIA6-08] Fabrication of lattice-relaxed thick Al0.6Ga0.4N films on annealed sputtered AlN formed on a-plane sapphire substrates

*Moe Shimokawa1, Sho Iwayama1,2, Shohei Teramura1, Sayaka Ishizuka1, Tomoya Omori1, Kazuki Yamada1, Syunya Tanaka1, Kosuke Sato1,3, Motoaki Iwaya1, Tetsuya Takeuchi1, Satoshi Kamiyama1, Isamu Akasaki4, Hideto Miyake2 (1. Meijo University, 2. Mie University, 3. Asahi Kasei Co., 4. Nagoya University)